Nonvolatile semiconductor memory and manufacturing method thereof

ABSTRACT

A nonvolatile semiconductor memory according to examples of the present invention comprises a memory cell and a peripheral transistor. The memory cell has a first intergate insulating film having a multilayer structure and provided on a floating gate electrode and an isolation insulating layer. The peripheral transistor has a second intergate insulating film having a multilayer structure and provided on a first gate electrode and a second isolation insulating layer. The first and second intergate insulating films have the same structure, and a lowermost insulating layer of the first intergate insulating film on the first isolation insulating layer is thinner than a lowermost insulating layer of the second intergate insulating film on the second isolation insulating layer.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application is based upon and claims the benefit of priority fromprior Japanese Patent Application No. 2006-254710, filed Sep. 20, 2006,the entire contents of which are incorporated herein by reference.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates to a nonvolatile semiconductor memory anda method of manufacturing, and more particularly, it relates to thestructure of intergate insulating films of a memory cell and aperipheral transistor.

2. Description of the Related Art

Nonvolatile semiconductor memories such as NAND type flash memories arenonvolatile and permit higher integration, and therefore, have recentlybeen installed in various electronic devices.

As the structure of a memory cell of the NAND type flash memory, a gateelectrode structure has been known in which a floating gate electrodeand a control gate electrode are stacked via an intergate insulatingfilm.

A stacked film (hereinafter, an ONO film) composed of a silicon oxidefilm, a silicon nitride film, and a silicon oxide film is often used forthe intergate insulating film to improve the coupling ratio of thememory cell.

However, as the memory cells are increasingly miniaturized, an oxidizerin an oxidizing process carried out after the formation of the gateelectrode diffuses into the silicon oxide films of the ONO film, andthus reacts with silicon films forming the floating gate electrode andthe control gate electrode. As a result, bird's beaks produced from thesilicon oxide films are formed at an interface between the ONO film andthe floating gate electrode or the control gate electrode, which reducesthe dielectric constant of the intergate insulating film and thecoupling ratio of the memory cell.

An effective way to avoid this problem is to use, as the intergateinsulating film, a film composed of a silicon nitride film, a siliconoxide film, a silicon nitride film, a silicon oxide film and a siliconnitride film (hereinafter, an NONON film) in which the silicon nitridefilms are further formed in the top and bottom layers of the ONO film.

However, the miniaturization of the memory cell causes another problemthat inter-cell interference is induced by parasitic capacitance betweenthe adjacent floating gate electrodes leading to a varied thresholdvoltage of the memory cell.

The cause of this problem is that the NONON film increases the parasiticcapacitance between the adjacent floating gate electrodes due to itshigher dielectric constant than that of the ONO film.

This aggravates the variation of a threshold voltage of the memory celldue to the inter-cell interference and degrades the performance of thememory cell.

On the other hand, an advantage of using the NONON film as the intergateinsulating film is that the diffusion of elements forming a fixed chargeinto a semiconductor substrate can be suppressed and that theperformance of the memory cell and of a peripheral transistor can beprevented from degrading.

BRIEF SUMMARY OF THE INVENTION

A nonvolatile semiconductor memory of an aspect of the present inventioncomprising: at least one memory cell and one peripheral transistordisposed on a semiconductor substrate, the memory cell having: a firstgate insulating film provided in a first element area of thesemiconductor substrate, the first element area being defined by a firstisolation insulating layer provided on the semiconductor substrate; afloating gate electrode provided on the first gate insulating film; afirst intergate insulating film having a multilayer structure andprovided on the floating gate electrode and the isolation insulatinglayer; and a control gate electrode provided on the first intergateinsulating film, the peripheral transistor having: a second gateinsulating film provided in a second element area of the semiconductorsubstrate, the second element area being defined by a second isolationinsulating layer provided on the semiconductor substrate; a first gateelectrode provided on the second gate insulating film; a secondintergate insulating film having a multilayer structure and provided onthe first gate electrode and the second isolation insulating layer; anda second gate electrode provided on the second intergate insulatingfilm, wherein the first and the second intergate insulating films havethe same structure, and an insulating film serving as a lowermost layerof the first intergate insulating film on the first isolation insulatinglayer is thinner than an insulating film serving as a lowermost layer ofthe second intergate insulating film on the second isolation insulatinglayer.

A nonvolatile semiconductor memory of an aspect of the present inventioncomprising: at least one memory cell and one peripheral transistordisposed on a semiconductor substrate, the memory cell having: a firstgate insulating film provided in a first element area of thesemiconductor substrate, the first element area being defined by a firstisolation insulating layer provided on the semiconductor substrate; afloating gate electrode provided on the first gate insulating film; afirst isolation insulating layer provided in a first element isolationarea of the semiconductor substrate; a first intergate insulating filmhaving a multilayer structure and provided on the floating gateelectrode and the isolation insulating layer; and a control gateelectrode provided on the first intergate insulating film, theperipheral transistor having: a second gate insulating film provided ina second element area of the semiconductor substrate, the second elementarea being defined by a second isolation insulating layer provided onthe semiconductor substrate; a first gate electrode provided on thesecond gate insulating film; a second intergate insulating film having amultilayer structure and provided on the first gate electrode and thesecond isolation insulating layer; and a second gate electrode providedon the second intergate insulating film, wherein an insulating filmserving as a lowermost layer of the second intergate insulating film onthe second isolation insulating layer is not disposed on the firstisolation insulating layer.

A method of manufacturing a nonvolatile semiconductor memory of anaspect of the present invention comprising: forming a first and a secondgate insulating film in a first and a second element area of asemiconductor substrate, respectively; forming a floating gate electrodematerial on the first gate insulating film and forming at the same timea first gate electrode material on the second gate insulating film;defining first and second element areas of the semiconductor substrateby forming first and second isolation insulating layers in thesemiconductor substrate, respectively; forming a first intergateinsulating film having a multilayer structure on the first isolationinsulating layer and the floating gate electrode material and forming atthe same time a second intergate insulating film having a multilayerstructure on the second isolation insulating layer and the second gateelectrode material; forming a control gate electrode material on thefirst intergate insulating film and forming at the same time a secondelectrode material on the second intergate insulating film; sequentiallyetching the control gate electrode material, the first intergateinsulating film and the floating gate electrode material to form astacked gate electrode of a memory cell, and sequentially etching at thesame time the second gate electrode material, the second intergateinsulating film and the first gate electrode material to form a stackedgate electrode of a peripheral transistor; after forming the stackedgate electrodes, by oxidizing process, reducing a thickness ofinsulating film serving as lowermost layer of the first intergateinsulating film on the first isolation insulating layer thinner than athickness of insulating film serving as a lowermost layer of the secondintergate insulating film on the second isolation insulating layer.

BRIEF DESCRIPTION OF THE SEVERAL VIEWS OF THE DRAWING

FIG. 1 is a diagram showing one example of the layout of a flash memory;

FIG. 2 is a plane view showing the structure of a memory cell array;

FIG. 3 is a sectional view along the III-III line in FIG. 2;

FIG. 4 is a sectional view along the IV-IV line in FIG. 2;

FIG. 5 is a plane view showing the structure of a peripheral transistorregion;

FIG. 6 is a sectional view along the VI-VI line in FIG. 5;

FIG. 7 is a sectional view along the VII-VII line in FIG. 5;

FIG. 8 is an enlarged view of an area VIII shown in FIG. 4;

FIG. 9 is an enlarged view of an area IX shown in FIG. 7;

FIG. 10 is a sectional view showing the structure of an intergateinsulating film of a memory cell;

FIG. 11 is a sectional view showing the structure of an intergateinsulating film of the peripheral transistor;

FIG. 12 is a sectional view showing a manufacturing process in a firstembodiment;

FIG. 13 is a sectional view showing a manufacturing process in the firstembodiment;

FIG. 14 is a sectional view showing a manufacturing process in the firstembodiment;

FIG. 15 is a sectional view showing a manufacturing process in the firstembodiment;

FIG. 16 is a sectional view showing a manufacturing process in the firstembodiment;

FIG. 17 is a sectional view showing a manufacturing process in the firstembodiment;

FIG. 18 is a sectional view showing a manufacturing process in the firstembodiment;

FIG. 19 is a sectional view showing a manufacturing process in the firstembodiment;

FIG. 20 is a sectional view showing a manufacturing process in the firstembodiment;

FIG. 21 is a sectional view showing a manufacturing process in the firstembodiment;

FIG. 22 is a sectional view showing a manufacturing process in the firstembodiment;

FIG. 23 is a sectional view showing a manufacturing process in the firstembodiment;

FIG. 24 is a sectional view showing a manufacturing process in the firstembodiment;

FIG. 25 is a sectional view showing a manufacturing process in the firstembodiment;

FIG. 26 is a sectional view showing a manufacturing process in the firstembodiment;

FIG. 27 is a sectional view showing a manufacturing process in the firstembodiment;

FIG. 28 is a sectional view showing a manufacturing process in the firstembodiment;

FIG. 29 is a sectional view showing a manufacturing process in the firstembodiment;

FIG. 30 is a sectional view showing the structure of the intergateinsulating film of the memory cell;

FIG. 31 is a sectional view showing the structure of the intergateinsulating film of the peripheral transistor;

FIG. 32 is a sectional view showing the structure of the intergateinsulating film of the memory cell;

FIG. 33 is a sectional view showing the structure of the intergateinsulating film of the peripheral transistor;

FIG. 34 is a sectional view showing the structure of the intergateinsulating film of the memory cell; and

FIG. 35 is a sectional view showing the structure of the intergateinsulating film of the peripheral transistor.

DETAILED DESCRIPTION OF THE INVENTION 1. Outline

Embodiments of the present invention concern the structures of intergateinsulating films of a memory cell and a peripheral transistor.

In the embodiments of the present invention, the intergate insulatingfilm is formed of a continuous film having a multilayer structure suchas a NONON film. In addition, a natural oxide film is interposed betweenthe intergate insulating film and a floating gate electrode in somecases, but the natural oxide film is not included as a part of theintergate insulating film.

In such an intergate insulating film, the thickness of a lowermost filmof the intergate insulating film on an isolation insulating layer of thememory cell is smaller than the thickness of a lowermost film of theintergate insulating film on the floating gate electrode, or thelowermost film of the intergate insulating film is not formed on theisolation insulating layer.

Furthermore, in the structure of the intergate insulating film of theperipheral transistor formed at the same time as the memory cell, thethickness of the lowermost film of the intergate insulating film on theisolation insulating layer of the memory cell is smaller than thethickness of the intergate insulating film formed on the isolationinsulating layer of the peripheral transistor.

Because the lowermost film of the intergate insulating film is thin onthe isolation insulating layer or not formed on the isolation insulatinglayer, parasitic capacitance between the floating gate electrodesadjacent in a row direction can be reduced.

Therefore, the amount of variation of a threshold voltage of the memorycell due to inter-cell interference can be reduced, and writecharacteristics of the memory cell can be improved.

On the other hand, in the peripheral transistor, the top of theisolation insulating layer and the top of the gate electrode are coveredwith the intergate insulating film of the peripheral transistor.

Thus, the diffusion of a fixed charge attributed to the intergateinsulating film or to a film higher than the intergate insulating filmcan be suppressed.

It is therefore possible to prevent the characteristic deterioration ofthe peripheral transistor due to the diffusion of the fixed charge.

2. Embodiments (1) First Embodiment

(a) Structure

FIG. 1 shows one example of the layout of a flash memory in a firstembodiment of the invention.

A flash memory comprises a memory cell array 100, and peripheralcircuits disposed therearound such as a row decoder circuit 110, a senseamplifier circuit 120 and a control circuit 130.

For example, in the case of a NAND type flash memory, the memory cellarray 100 comprises a plurality of blocks BK1, BK2, . . . , BKn, andeach block further comprises a plurality of NAND cell units.

FIG. 2 shows a plane view of a part of the memory cell array 100.Further, FIG. 3 shows a sectional view along the III-III line in FIG. 2,and FIG. 4 shows a sectional view along the IV-IV line in FIG. 2.

As shown in FIGS. 2 to 4, the memory cell array 100 comprises a firstelement area AA1 in which the NAND cell units are formed, and a firstelement separation area STIF by which two element areas AA1 adjacent ina row direction are separated from each other.

In the element area AA1, there are arranged a plurality of memory cellsMC, and selective transistors ST1 and ST2 disposed at both ends of theplurality of memory cells MC. One end of the plurality of the memorycell MC is connected to a bit line BL via a bit line contact BCconnected to a diffusion layer of the selective transistor ST1. Theother end thereof is connected to a common source line (not shown) viathe selective transistor ST2.

The memory cell MC is a metal-insulator-semiconductor (MIS) transistorhaving a stacked gate structure composed of a floating gate electrode 3Aand a control gate electrode 5A.

The floating gate electrode 3A is formed on a first gate insulating film2A on the element area AA1. The floating gate electrodes 3A adjacent inthe row direction are separated from each other by a first isolationinsulating layer 6 formed in the element separation area.

The control gate electrode 5A is formed on the floating gate electrode3A via a first intergate insulating film 4A. This control gate electrode5A extends in an X direction to cover the upper surfaces of the floatinggate electrode 3A and the isolation insulating layer 6 via the intergateinsulating film 4A.

The control gate electrode 5A covers not only the upper surface of thefloating gate electrode 3A but also the side surfaces thereof in the rowdirection via the intergate insulating film 4A, and thus ensures a highcoupling ratio.

Furthermore, a diffusion layer 7 is formed as a source/drain area toconnect the adjacent two memory cells in series with each other.

The selective transistors ST1 and ST2 are formed at both ends of a NANDstring composed of the plurality of memory cells MC.

The selective transistors ST1 and ST2 are formed at the same time as thememory cells MC, so that the gate electrodes of the selectivetransistors ST1 and ST2 have stacked structures.

The gate structure is formed on a gate insulating film 2B, and in thisstructure, a gate electrode 3B formed at the same time as the floatinggate electrode 3A is connected to a gate electrode 5B formed at the sametime as the control gate electrode 5A via an opening P formed in anintergate insulating film 4B.

Furthermore, the flash memory is not only constituted of the memorycells, but also includes a peripheral transistor forming, for example,the control circuit on the same chip as the memory cell array.

FIG. 5 shows a plane view of the peripheral transistor. Further, FIG. 6shows a sectional view along the VI-VI line in FIG. 5, and FIG. 7 showsa sectional view along the VII-VII line in FIG. 5.

The peripheral transistor is disposed on a second element area AA2 in aperipheral region.

The peripheral transistor is formed at the same time as the memory cell,so that the gate electrode of the peripheral transistor has a stackedstructure composed of a first gate electrode 10 on a second gateinsulating film 9 and a second gate electrode 12. Moreover, the stackedgate electrode of the peripheral circuit transistor is formed to have afeature size larger than that of the gate electrode of the memory cell.Thus a width W1 in a Y direction of the gate electrode of the peripheralcircuit is larger than a width W2 in the Y direction of the gateelectrode of the memory cell.

The stacked gate electrode of the peripheral transistor have a structurein which the first gate electrode 10 formed at the same time as thefloating gate electrode 3A of the memory cell is connected to the secondgate electrode 12 formed at the same time as the control gate electrode5A via an opening Q formed in a second intergate insulating film 11.

A diffusion layer 14 is formed as the source or drain of the peripheraltransistor in a semiconductor substrate 1.

Furthermore, a metal interconnect layer L1 is connected to the gateelectrodes 10 and 12 via a contact portion C1. Moreover, metalinterconnect layers L2 and L3 are connected to the diffusion layer 14serving as the source or drain via contact portions C2 and C3,respectively.

The structure of the intergate insulating film 4A, 11 in the embodimentof the present invention will be described using FIGS. 8 and 9.

FIG. 8 shows an enlarged view of an area VIII enclosed by a broken linein FIG. 4.

In the present embodiment, the intergate insulating film 4A of thememory cell is, for example, a continuous film or a so-called NONON filmhaving a five-layer structure composed of a silicon nitride film 4 a 1,4 a 2, a silicon oxide film 4 b, a silicon nitride film 4 c, a siliconoxide film 4 d and a silicon nitride film 4 e, as shown in FIG. 8.

The thickness of the silicon nitride film 4 a 1, 4 a 2 in the lowermostlayer of the intergate insulating film 4A having the five-layerstructure varies depending on whether this silicon nitride film is onthe floating gate electrode 3A made of polysilicon or on the isolationinsulating layer 6 made of silicon oxide.

This is attributed to the fact that the nitriding rate on the floatinggate electrode 3A made of polysilicon is different from that on theisolation insulating layer 6 made of silicon oxide because the siliconnitride film 4 a 1, 4 a 2 serving as the lowermost layer of theintergate insulating film 4A is formed by radical nitriding.

Therefore, a thickness T1′ of the silicon nitride film 4 a 1 formed onthe isolation insulating layer 6 is smaller than a thickness T2 of thesilicon nitride film 4 a 2 formed on the floating gate electrode 3A.

In addition, the intergate insulating film 4A is a continuous filmhaving a multilayer structure, and the thickness of a lowermost filmformed on the isolation insulating layer of the multilayer film has onlyto be smaller than the thickness of a lowermost film formed on thefloating gate electrode. Thus, the intergate insulating film 4A is notlimited to the NONON film, and may be, for example, a multilayer filmusing high dielectric films made of HfAlO, AlO, HfSiO, ZrSiO, etc. Asone example of such, high dielectric films may be used instead of thesilicon oxide films described above, and a multilayer structure may beformed by the silicon nitride films and these high dielectric films.

When the structure of the intergate insulating film as described aboveis used, the parasitic capacitance between the floating gate electrodes3A adjacent in the row direction is reduced owing to the small thicknessof the silicon nitride film serving as the lowermost layer of theintergate insulating film 4A formed on the isolation insulating layer.

Therefore, the variation of a threshold voltage of the memory cell dueto inter-cell interference can be suppressed, and write characteristicsof the memory cell can be improved.

Furthermore, FIG. 9 is an enlarged view showing one example of thestructure of the intergate insulating film 11 in an area IX enclosed bya broken line in the peripheral transistor in FIG. 7.

The intergate insulating film 11 of the peripheral transistor is formedat the same time as the intergate insulating film of the memory cell,and is therefore, for example, a contiguous multilayer film such as aNONON film.

This intergate insulating film 11 is formed on the first gate electrode10 and a second isolation insulating layer 13 in a second elementisolation area STI2 of the semiconductor substrate 1.

In the insulating film serving as the lowermost layer of the multilayerstructure intergate insulating film 11 of the peripheral transistor, athickness T3 of a silicon nitride film 11 a 1 on the isolationinsulating layer 13 is equal to or smaller than a thickness T4 of asilicon nitride film 11 a 2 formed on the gate electrode 10 of theperipheral transistor.

The present embodiment is characterized in that the thickness T1 of thesilicon nitride film 4 a 1 formed on the isolation insulating layer 6 ofthe memory cell shown in FIG. 8 is smaller than the thickness T3 of thesilicon nitride film 11 a 1 formed on the isolation insulating layer 13of the intergate insulating film 11 of the peripheral transistor.

That is, the thickness T3 is larger than the thickness T1′, and equal toor smaller than the thickness T4. In addition, the thickness T2 is, forexample, equal to the thickness T4.

Furthermore, FIGS. 10 and 11 are Y-direction sectional views of theintergate insulating films 4 and 11 on the isolation insulating layers 6and 13 in the memory cell and the peripheral transistor.

As shown in FIG. 10, in the intergate insulating film 4 of the memorycell, the lowermost film (silicon nitride film) 4 a 1 of the intergateinsulating film on the isolation insulating layer 6 has, for example, auniform thickness and is equal to the thickness T1′ in every part.

Furthermore, as shown in FIG. 11, in the lowermost film on the isolationinsulating layer 13 of the intergate insulating film of the peripheraltransistor, a thickness T3′ of the intergate insulating film at the endof the gate electrode is smaller than the thickness T3 of the intergateinsulating film in the center of the gate electrode.

The reason for this is that when a sidewall oxidizing process is carriedout after gate processing, an oxidizer diffuses in the isolationinsulating layer up to the center of the gate electrode so that theentire surface of the silicon nitride film 4 a 1 is uniformly oxidizedin the memory cell processed in a micro feature size.

On the other hand, in the peripheral transistor processed in a largerfeature size than the memory cell, the oxidizer does not diffuse up tothe center of the gate electrode. Thus, the intergate insulating film 11a 1 is oxidized and its thickness is reduced at the end of the gateelectrode alone, and the silicon nitride film 11 a 1 is not oxidized andits thickness does not change in the center of the gate electrode.

Therefore, in the multilayer structure intergate insulating film of theperipheral transistor, the thickness T3′ of the intergate insulatingfilm 11 at the end of the gate electrode is smaller than the thicknessT3 of the intergate insulating film 11 in the center of the gateelectrode. In addition, the thickness T3′ at the end of the lowermostfilm 11 a 1 of the intergate insulating film 11 is, for example, equalto the thickness T1 of the lowermost film 4 a 1.

With regard to the memory cell, the structure described above makes itpossible to reduce the parasitic capacitance between the adjacentfloating gate electrodes of the memory cell and reduce the amount ofvariation of the threshold voltage of the memory cell due to theinter-cell interference.

Furthermore, with regard to the peripheral transistor, the intergateinsulating film 11 a 1 is formed on the isolation insulating layer 13,such that it is possible to suppress the diffusion of elements forming afixed charge into the semiconductor substrate 1 located lower than theintergate insulating film 11, especially in the vicinity of an interfacebetween the isolation insulating layer 13 and the semiconductorsubstrate 1.

For example, when the high dielectric films made of HfAlO, AlO, HfSiO,ZrSiO, etc. are used for the multilayer structure intergate insulatingfilms, Hf, Al, Zr, etc. easily diffuse as fixed charges into thesemiconductor substrate 1.

Therefore, the present embodiment is more effective when the highdielectric films are used for the intergate insulating films.

Thus, the intergate insulating film 11 a 1 is formed to be thicker thanthe intergate insulating film 4 a 1, such that the formation of thefixed charge can prevent the degradation of the performance of theperipheral transistor.

In addition, the effects described above can be obtained even when, forexample, natural oxide films such as silicon oxide films are formedbetween the floating gate electrode 3A and the lowermost film 4 a 1 andbetween the gate electrode 10 and the lowermost film 11 a 1.

(b) Manufacturing Method

A method of manufacturing the memory cell and the peripheral transistorshown in the present embodiment will be described below.

First, as shown in FIGS. 12 and 13, a well region Well is formed by, forexample, an ion implantation method in the semiconductor substrate 1 ina memory cell area where the memory cell is provided and in a peripheraltransistor area where the peripheral transistor is provided. Then, thefirst and the second gate insulating films 2 and 9 are formed on thesurface of the semiconductor substrate 1 by, for example, a thermaloxidation method.

Next, polysilicon films 3 and 10 serving as the floating gate electrodeof the memory cell and the first gate electrode of the peripheraltransistor are formed on the gate insulating film 2 by, for example, achemical vapor deposition (CVD) method.

Subsequently, silicon nitride films 16 serving as mask materials areformed on the polysilicon films 3 and 10 by, for example, the CVDmethod. Further, the silicon nitride films 16 are patterned so that thepolysilicon films 3 and 10 have a desired channel width, respectively,and then etching is carried out by, for example, a reactive ion etching(RIE) method to reach the inside of the semiconductor substrate 1. Thus,isolation trench are formed in the semiconductor substrate 1 in thememory cell area and the peripheral transistor area. In addition, atthis point, the feature size of the peripheral transistor in the channelwidth direction is formed to be greater than the feature size of thememory cell in the channel width direction.

Next, for example, a silicon oxide serving as the isolation insulatinglayers in the memory cell area and the peripheral transistor area isformed on the entire surface of the semiconductor substrate 1 by, forexample, the CVD method so that the isolation trench are completelyembedded with the silicon oxide. Then, the isolation insulating layersare planarized by chemical mechanical polishing (CMP) using the siliconnitride films 16 as stopper films.

Furthermore, the SiN film as the mask material is removed, and then thefirst isolation insulating layer 6 is etched back so that the uppersurface of the isolation insulating layer 6 is positioned lower than theupper surface of the polysilicon film 3 serving as the floating gateelectrode in the memory cell area, as shown in FIGS. 14 and 15.

Then, the intergate insulating film 4 is formed on the polysilicon film3 and the isolation insulating layer 6.

In the peripheral transistor area, the intergate insulating film 11 isformed on the polysilicon film 10 and the second isolation insulatinglayer 13 at the same time as the memory cell area, as shown in FIGS. 16and 17.

Here, as shown in FIG. 18, the intergate insulating film 4 of the memorycell is a continuous film having a five-layer structure composed of thesilicon nitride film 4 a 1, 4 a 2, the silicon oxide film 4 b, thesilicon nitride film 4 c, the silicon oxide film 4 d and the siliconnitride film 4 e. Moreover, as shown in FIG. 19, the intergateinsulating film 11 of the peripheral transistor is also a continuousfilm having a five-layer structure composed of the silicon nitride film11 a 1, 11 a 2, a silicon oxide film 11 b, a silicon nitride film 11 c,a silicon oxide film 11 d and a silicon nitride film 11 e.

The silicon nitride films 4 a 1, 4 a 2, 11 a 1 and 11 a 2 serving as thelowermost layers of the five-layer structure intergate insulating films4 and 11 are formed by nitriding the surface of the polysilicon films 3,10 and the surface of the isolation insulating layers 6, 13 throughradical nitriding which is carried out under, for example, the followingconditions: Ar=1000 sccm, N2=40 sccm, RF power=500 W or less, andpressure=1.33×10² Pa or more.

The thickness of the silicon nitride films 4 a 1, 4 a 2, 11 a 1 and 11 a2 formed by radical nitriding varies depending on the parts where theyare formed because the nitriding rate is different depending on the partwhere nitride films are formed, unlike those formed by the CVD method ata uniform thickness.

That is, polysilicon forming the floating gate electrode 3 and the firstgate electrode 10 has a large number of dangling bonds on its surface,and therefore relatively easily reacts with a nitrogen radical. On theother hand, the silicon oxide forming the isolation insulating layer 6,13 has a small number of dangling bonds on its surface, and does noteasily react with the nitrogen radical because the bond energy betweensilicon atoms and oxygen atoms forming silicon oxide is strong.

As a result, the thickness T1, T3 of the silicon nitride film 4 a 1, 11a 1 formed on the isolation insulating layer 6, 13 is formed to besmaller than the thickness T2, T4 of the silicon nitride film 4 a 2, 11a 2 formed on the polysilicon film 3. In addition, the silicon nitridefilms 4 a 1 and 11 a 1 on the isolation insulating layers 4 and 13 areformed at the same time in the memory cell and the peripheraltransistor, and thus have the same thickness.

After the silicon nitride films 4 a 1, 4 a 2, 11 a 1 and 11 a 2 servingas the lowermost layers of the intergate insulating films are formed byradical nitriding, the silicon oxide films 4 b and 11 b, the siliconnitride films 4 c and 11 c, the silicon oxide films 4 d and 11 d, andthe silicon nitride films 4 e and 11 e are sequentially formed by, forexample, the CVD method. These films are formed by the CVD method at,for example, a uniform thickness on the silicon nitride films 4 a 1, 4 a2, 11 a 1 and 11 a 2.

In addition, the silicon nitride films serving as the lowermost layersof the intergate insulating films 4 and 11 may be formed by the CVDmethod. In this case, the thickness of the silicon nitride films servingas the lowermost layers is the same on the polysilicon films 3 and 10and the isolation insulating layers 6 and 11.

Furthermore, after the intergate insulating films 4 and 11 are formed,the openings P and Q are formed by, for example, the RIE method in theintergate insulating films 4 and 11 where the selective transistors andthe peripheral transistor are scheduled to be formed.

Next, the polysilicon films serving as control electrodes of the memorycell are formed by, for example, the CVD method on the intergateinsulating films 4 and 11. Further, the polysilicon films are patternedso that the memory cell, the selective transistors and the peripheraltransistor have desired channel lengths, and gate processing is carriedout by, for example, the RIE method.

Then, as shown in FIGS. 20 and 21, in the memory cell area, there areformed a stacked gate electrode of the memory cell composed of thefloating gate electrode 3A, the intergate insulating film 4A and thecontrol gate electrode 5A, and a stacked gate electrode of the selectivetransistor ST1, ST2 in which the gate electrodes 3B and 5B are stackedvia the partially opened intergate insulating film 4B. Moreover, theX-direction sidewalls of the floating gate electrode 3A are covered withthe control gate electrode 5A via the intergate insulating film 4A.

Furthermore, as shown in FIGS. 22 and 23, in the peripheral transistorarea, a stacked gate electrode of the peripheral transistor in which thegate electrodes 10 and 12 are connected to each other via the partiallyopened intergate insulating film 11 is formed in a process simultaneouswith the formation of the memory cell area.

At this point, a size W2 in a channel length direction (Y direction) ofthe peripheral transistor is gate-processed to be larger than a size W1in the channel length direction of the memory cell.

Moreover, after the gate processing, thermal oxidation is carried out inan oxidation atmosphere at, for example, 1085° C., so that sidewalloxide films (not shown) having a thickness of, for example, 10 nm areformed on the sidewalls of the gate electrodes of the memory cell andthe peripheral transistor.

At this point, an oxidizer supplied from the end of the gate diffusesinto the entire the isolation insulating layer 6 in the memory cell inwhich the feature size of the gate electrode is small.

Therefore, as shown in FIG. 24, the entire silicon nitride film 4 a 1 onthe isolation insulating layer 6 of the memory cell is oxidized by theoxidizer which diffuses within the isolation insulating layer 6, so thatthe thickness of the silicon nitride film 4 a 1 decreases to a thicknessT1′ from a thickness T1. That is, the sidewall oxidizing process iscarried out after the gate processing, such that the thickness T1′ ofthe silicon nitride film 4 a 1 formed on the isolation insulating layer6 of the memory cell is smaller than the thickness T1 of the siliconnitride film formed by radical nitriding.

On the contrary, in the peripheral transistor in which the processingdimension of the gate electrode is larger than that in the memory cell,the oxidizer supplied from the end of the gate electrode does notdiffuse throughout the entire isolation insulating layer 13 because theperipheral transistor is formed in is a large processing dimension, asshown in FIG. 25. Thus, the silicon nitride film 11 a 1 on the isolationinsulating layer 13 of the peripheral transistor is oxidized at its end,but is not entirely oxidized, so that the thickness at the time of itsformation is maintained, and the thickness T3 of the silicon nitridefilm 11 a 1 does not decrease.

Therefore, the thickness T1′ of the silicon nitride film 4 a 1 issmaller than the thickness T3 of the silicon nitride film 11 a 1.

Furthermore, FIGS. 26 and 27 show the Y-direction sectional structure ofthe intergate insulating films 4 and 11 on the isolation insulatinglayers 6 and 13.

In the memory cell, the entire silicon nitride film 4 a 1 serving as thelowermost layer of the intergate insulating film 4 is oxidized as shownin FIG. 26, so that its thickness T1′ at the end and center is equal.

On the other hand, in the peripheral transistor, the insulating film 11a 1 serving as the lowermost layer of the intergate insulating film 11is oxidized and becomes thinner at its end due to the sidewall oxidizingprocess as described above, but is not oxidized in its center. Thus, thethickness T3′ at the end of the silicon nitride film 11 a 1 is smallerthan the thickness T3 in the center of the insulating film 11 a 1.

In addition, FIGS. 28 and 29 show cases where the silicon nitride films4 a 1, 4 a 2, 11 a 1 and 11 a 2 are formed by the CVD method.

In this case, in the memory cell, the silicon nitride film serving asthe lowermost layer of the intergate insulating film has, at the time ofits formation, the same thickness on the isolation insulating layer 6and on the floating gate electrode 3, as shown in FIG. 28. However,since the entire silicon nitride film on the isolation insulating layer6 is oxidized by the sidewall oxidizing process, the thickness T1′ ofthe silicon nitride film 4 a 1 formed on the isolation insulating layer6 of the memory cell is smaller than the thickness T2 of the siliconnitride film 4 a 2 on the floating gate electrode 3.

Furthermore, as shown in FIG. 29, in the peripheral transistor, thethickness T3 of the silicon nitride film 11 a 1 formed on the isolationinsulating layer 13 is equal to the thickness T4 of the silicon nitridefilm 11 a 2 formed on the gate electrode 10 even after the sidewalloxidizing process.

In addition, the Y-direction sectional structures of the intergateinsulating films 4 and 11 on the isolation insulating layers 6 and 13are also similar to those in FIGS. 26 and 27 when the silicon nitridefilms 4 a 1, 4 a 2, 11 a 1 and 11 a 2 are formed by the CVD method.

Subsequently, as shown in FIGS. 2 to 7, the diffusion layers 7 and 14are formed in the semiconductor substrate 1 in a self-aligning mannerusing the gate electrodes as masks, in the memory cell area and theperipheral transistor area. Then, insulating films 8 and 15 are formedon the entire surface of the semiconductor substrate 1 by, for example,the CVD method.

Furthermore, in the memory cell area, a bit line contact portion BC isembedded to reach the drain of the selective transistor ST1 via acontact hole formed in the insulating film 8. Then, the bit line BL isconnected to the bit line contact portion BC.

Moreover, in the peripheral transistor area, the contact plugs C1, C2and C3 are embedded to reach the electrode of the peripheral transistorand the source and drain diffusion layer 14 via a contact hole formed inthe insulating film 15. Then, the metal interconnect layer L1, L2 and L3is connected to a contact plug C1, C2 and C3.

The memory cell and the peripheral transistor in the present embodimentare formed in the manufacturing process described above.

As described above, the silicon nitride films 4 a 1, 4 a 2, 11 a 1 and11 a 2 serving as the lowermost layers of the intergate insulating filmsare formed by radical nitriding or the CVD method. Further, the sidewalloxidizing process is carried out after the gate processing.

Therefore, as shown in FIGS. 24 and 28, the thickness T1 of the siliconnitride film 4 a 1 on the isolation insulating layer 6 can be formed tobe smaller than the thickness T2 of the silicon nitride film 4 a 2 onthe floating gate electrode 3A in memory cell.

Thus, the parasitic capacitance between the floating gate electrodesadjacent in the X direction is reduced owing to the small thickness ofthe silicon nitride film 4 a 1 formed on the isolation insulating layer6.

It is therefore possible to manufacture a memory cell which can suppressa further variation of the threshold voltage of the memory cell due tothe inter-cell interference.

On the other hand, as shown in FIGS. 25 and 29, the silicon nitride film11 a 1 on the isolation insulating layer 13 can suppress the diffusionof the fixed charge into the semiconductor substrate in the peripheraltransistor.

It is therefore possible to manufacture a peripheral transistor whichcan prevent the deterioration of the operating characteristics of thetransistor due to the fixed charge.

(2) Second Embodiment

Structures in a second embodiment will be described below using FIGS. 30to 35.

It is to be noted that all the structures of a memory cell and aperipheral transistor are similar to those in the first embodiment, andthat the same signs are assigned to the same members and these membersare not described in detail.

FIGS. 30 to 35 are diagrams showing the structures of intergateinsulating films 4A and 11 of the memory cell and the peripheraltransistor in the present embodiment.

In the present embodiment, a silicon nitride film serving as a lowermostlayer of the intergate insulating film 4A of the memory cell is asilicon nitride film 4 a 2 formed on a floating gate electrode 3A alone,and no silicon nitride film serving as a lowermost layer is formed on anisolation insulating layer 6.

More specifically, the silicon nitride film 4 a 2 is formed on the uppersurface of the floating gate electrode 3A and on part of the sidewall ofthe floating gate electrode 3A which is not in contact with theisolation insulating layer 6. At this point, a silicon oxide film 4 bformed by, for example, a CVD method is in contact with the top of theisolation insulating layer 6.

On the other hand, as shown in FIG. 31, a silicon nitride film 1 a 1serving as a lowermost layer of the intergate insulating film 11 of theperipheral transistor is formed on an isolation insulating layer 13 ofthe peripheral transistor.

Such a structure can be obtained by changing the conditions of thesidewall oxidizing process of the gate electrode after gate processingshown in the first embodiment, for example, by increasing theconcentration of an oxidizer so that the diffusion of the oxidizer intothe isolation insulating layer 6 is promoted.

A case will be described below where a silicon nitride film serving asthe lowermost layer of the intergate insulating film is formed byradical nitriding. In addition, in the case of formation by radicalnitriding, conditions are set to be similar to the conditions in thefirst embodiment, or set so that a radical reaction is suppressed by,for example, reducing one of RF power, gas pressure and theconcentration of a nitrogen gas.

When a silicon nitride film serving as the lowermost layer of theintergate insulating film is formed under the radical nitridingconditions shown in the first embodiment, the silicon nitride film hasthe same thickness on the isolation insulating layers 6 and 13 of thememory cell and the peripheral transistor. Or, under the conditionswhere the radical nitriding is suppressed, the thickness of the siliconnitride film is smaller than the thickness of the silicon nitride filmformed under the radical nitriding conditions in the first embodiment.

Then, as in the first embodiment, a gate electrode sidewall oxidizingprocess is carried out. At this moment, oxidation is carried out untilthe silicon nitride film on the isolation insulating layer 6 of thememory cell is sufficiently oxidized by the oxidizer diffusing in theisolation insulating layer 6 and disappears. In the peripheraltransistor, the oxidizer only diffuses in the end of the isolationinsulating layer 13 owing to the large feature size of this isolationinsulating layer 13, so that the silicon nitride film 11 a 1 on theisolation insulating layer 13 maintains the thickness at which it hasbeen formed by radical nitriding.

Therefore, as shown in FIG. 30, no silicon nitride film serving as thelowermost layer of the intergate insulating film 4A is present on theisolation insulating layer 6 in the memory cell. In the peripheraltransistor, the silicon nitride film 11 a 1 on the isolation insulatinglayer 13 is formed at a thickness T3, as shown in FIG. 31.

At this point, the thickness T3 of the silicon nitride film 11 a 1formed on the isolation insulating layer 13 of the peripheral transistoris smaller than a thickness T4 of a silicon nitride film 11 a 2 formedon a first gate electrode 10.

Furthermore, FIGS. 32 and 33 are Y-direction sectional views of theintergate insulating films 4A and 11 on the isolation insulating layers6 and 13 in the memory cell and the peripheral transistor.

As shown in FIG. 32, no silicon nitride film serving as the lowermostlayer of the intergate insulating film is present on the isolationinsulating layer 6 in the memory cell.

On the other hand, as shown in FIG. 33, the end of the intergateinsulating film 11 alone is oxidized in the peripheral transistor. Thus,a thickness T3′ at the end of the silicon nitride film 11 a 1 serving asthe lowermost layer of the intergate insulating film on the isolationinsulating layer 13 is smaller than the thickness T3 in the center ofthe silicon nitride film 11 a 1.

Furthermore, FIGS. 34 and 35 show the structures of the intergateinsulating films 4A and 11 of the memory cell and the peripheraltransistor in the case where the silicon nitride film serving as thelowermost layer of the gate insulating film is formed by the CVD method.In the present example, the thickness of the silicon nitride filmserving as the lowermost layer of the intergate insulating film isreduced by the CVD method under the conditions where the thickness ofthe silicon nitride film is smaller than the thickness of the siliconnitride film formed under the CVD method conditions in the firstembodiment.

In this case, the sidewall oxidizing process is carried out until thesilicon nitride film on the isolation insulating layer 6 of the memorycell disappears, as in the case described above.

Therefore, as shown in FIG. 34, no silicon nitride film serving as thelowermost layer of the intergate insulating film 4A of the memory cellis present on the isolation insulating layer 6.

At this point, the silicon nitride film 11 a 1 serving as the lowermostlayer of the intergate insulating film 11 of the peripheral transistoris formed at the thickness T3 on the isolation insulating layer 13 ofthe peripheral transistor.

Moreover, since the silicon nitride film 11 a 1 is a film formed by theCVD method, the thickness T3 of this silicon nitride film 11 a 1 isequal to the thickness T4 of the silicon nitride film 11 a 2 formed onthe first gate electrode 10. In addition, the Y-direction structures ofthe intergate insulating films 4A and 11 on the isolation insulatinglayers 6 and 13 are the same as those in FIGS. 32 and 33.

As described above, no silicon nitride film serving as the lowermostlayer of the intergate insulating film is disposed on the isolationinsulating layer 6 of the memory cell, as shown in FIGS. 30 to 35.Moreover, the silicon nitride film 11 a 1 serving as the lowermost layerof the intergate insulating film 11 is formed at, for example, thethickness T3 on the isolation insulating layer 13 of the peripheraltransistor.

Thus, no silicon nitride film on the isolation insulating layer ispresent in the memory cell, such that parasitic capacitance betweenadjacent floating gates of the memory cell is further reduced.

Therefore, the variation of a threshold voltage of the memory cell dueto inter-cell interference can be suppressed.

On the other hand, the silicon nitride film on the isolation insulatinglayer can suppress the diffusion of a fixed charge into a semiconductorsubstrate in the peripheral transistor.

It is therefore possible to prevent the characteristic deterioration ofthe peripheral transistor due to the fixed charge.

3. Others

Examples of the present invention are not limited to the NAND type flashmemory described in the embodiments, and can be applied to a nonvolatilesemiconductor memory using a memory cell having a floating gateelectrode, such as a NOR type or AND type flash memory.

Additional advantages and modifications will readily occur to thoseskilled in the art. Therefore, the invention in its broader aspects isnot limited to the specific details and representative embodiments shownand described herein. Accordingly, various modifications may be madewithout departing from the spirit or scope of the general inventiveconcept as defined by the appended claims and their equivalents.

1. A nonvolatile semiconductor memory comprising: at least one memorycell and one peripheral transistor disposed on a semiconductorsubstrate, the memory cell having: a first gate insulating film providedin a first element area of the semiconductor substrate, the firstelement area being defined by a first isolation insulating layerprovided on the semiconductor substrate; a floating gate electrodeprovided on the first gate insulating film; a first intergate insulatingfilm having a multilayer structure and provided on the floating gateelectrode and the isolation insulating layer; and a control gateelectrode provided on the first intergate insulating film, theperipheral transistor having: a second gate insulating film provided ina second element area of the semiconductor substrate, the second elementarea being defined by a second isolation insulating layer provided onthe semiconductor substrate; a first gate electrode provided on thesecond gate insulating film; a second intergate insulating film having amultilayer structure and provided on the first gate electrode and thesecond isolation insulating layer; and a second gate electrode providedon the second intergate insulating film, wherein the first and thesecond intergate insulating films have the same structure, and aninsulating film serving as a lowermost layer of the first intergateinsulating film on the first isolation insulating layer is thinner thanan insulating film serving as a lowermost layer of the second intergateinsulating film on the second isolation insulating layer.
 2. Thenonvolatile semiconductor memory according to claim 1, wherein thethickness at the end of the insulating film serving as the lowermostlayer of the second intergate insulating film on the second isolationinsulating layer is smaller than the thickness in the center of theinsulating film serving as the lowermost layer of the second intergateinsulating film on the second isolation insulating layer.
 3. Thenonvolatile semiconductor memory according to claim 1, wherein theinsulating film serving as a lowermost layer of the first intergateinsulating film on the first isolation insulating layer is thinner thanan insulating film serving as a lowermost layer of the first intergateinsulating film on the floating gate electrode.
 4. The nonvolatilesemiconductor memory according to claim 1, wherein the size of the gateelectrode of the peripheral transistor is larger than the size of thegate electrode of the memory cell.
 5. The nonvolatile semiconductormemory according to claim 1, wherein the insulating films serving as thelowermost layers of the first and second intergate insulating films aresilicon nitride films.
 6. The nonvolatile semiconductor memory accordingto claim 1, wherein the first and second intergate insulating filmshaving the multilayer structures include silicon nitride films andsilicon oxide films.
 7. The nonvolatile semiconductor memory accordingto claim 1, wherein the first and second intergate insulating filmshaving the multilayer structures include silicon nitride films and highdielectric films.
 8. A nonvolatile semiconductor memory comprising: atleast one memory cell and one peripheral transistor disposed on asemiconductor substrate, the memory cell having: a first gate insulatingfilm provided in a first element area of the semiconductor substrate,the first element area being defined by a first isolation insulatinglayer provided on the semiconductor substrate; a floating gate electrodeprovided on the first gate insulating film; a first intergate insulatingfilm having a multilayer structure and provided on the floating gateelectrode and the isolation insulating layer; and a control gateelectrode provided on the first intergate insulating film, theperipheral transistor having: a second gate insulating film provided ina second element area of the semiconductor substrate, the second elementarea being defined by a second isolation insulating provided on thesemiconductor substrate; a first gate electrode provided on the secondgate insulating film; a second intergate insulating film having amultilayer structure and provided on the first gate electrode and thesecond isolation insulating layer; and a second gate electrode providedon the second intergate insulating film, wherein an insulating filmserving as a lowermost layer of the second intergate insulating film onthe second isolation insulating layer is not disposed on the firstisolation insulating layer.
 9. The nonvolatile semiconductor memoryaccording to claim 8, wherein the thickness at the end of the insulatingfilm serving as the lowermost layer of the second intergate insulatingfilm on the second isolation insulating layer is smaller than thethickness in the center of the insulating film serving as the lowermostlayer of the second intergate insulating film on the second isolationinsulating layer.
 10. The nonvolatile semiconductor memory according toclaim 8, wherein the size of the gate electrode of the peripheraltransistor is larger than the size of the gate electrode of the memorycell.
 11. The nonvolatile semiconductor memory according to claim 8,wherein the first and second intergate insulating films having themultilayer structures include silicon nitride films and silicon oxidefilms.
 12. The nonvolatile semiconductor memory according to claim 11,wherein the silicon nitride film is in contact with the top of thesecond isolation layer.
 13. The nonvolatile semiconductor memoryaccording to claim 11, wherein the silicon oxide film is in contact withthe top of the first isolation layer.
 14. The nonvolatile semiconductormemory according to claim 8, wherein the first and second intergateinsulating films having the multilayer structures include siliconnitride films and high dielectric films.
 15. The nonvolatilesemiconductor memory according to claim 14, wherein a silicon nitridefilm is in contact with the top of the second isolation layer.
 16. Thenonvolatile semiconductor memory according to claim 14, wherein a highdielectric film is in contact with the top of the first isolation layer.17. A method of manufacturing a nonvolatile semiconductor memory, themethod comprising: forming a first and a second gate insulating film ona semiconductor substrate, respectively; forming a floating gateelectrode material on the first gate insulating film and forming at thesame time a first gate electrode material on the second gate insulatingfilm; defining first and second element areas of the semiconductorsubstrate by forming first and second isolation insulating layers in thesemiconductor substrate, respectively; forming a first intergateinsulating film having a multilayer structure on the first isolationinsulating layer and the floating gate electrode material and forming atthe same time a second intergate insulating film having a multilayerstructure on the second isolation insulating layer and the second gateelectrode material; forming a control gate electrode material on thefirst intergate insulating film and forming at the same time a secondelectrode material on the second intergate insulating film; sequentiallyetching the control gate electrode material, the first intergateinsulating film and the floating gate electrode material to form astacked gate electrode of a memory cell, and sequentially etching at thesame time the second gate electrode material, the second intergateinsulating film and the first gate electrode material to form a stackedgate electrode of a peripheral transistor; after forming the stackedgate electrodes, by oxidizing process, reducing a thickness ofinsulating film serving as lowermost layer of the first intergateinsulating film on the first isolation insulating layer thinner than athickness of insulating film serving as a lowermost layer of the secondintergate insulating film on the second isolation insulating layer. 18.The method of manufacturing a nonvolatile semiconductor memory accordingto claim 17, wherein the stacked gate electrodes are formed so that asize of the stacked gate electrode of a peripheral transistor is largerthan a size of the stacked gate electrode of a memory cell.
 19. Themethod of manufacturing a nonvolatile semiconductor memory according toclaim 17, wherein the oxidizing process is carried out until theinsulating film serving as the lowermost layer of the first intergateinsulating films on the first isolation insulating layer disappears. 20.The method of manufacturing a nonvolatile semiconductor memory accordingto claim 17, wherein the insulating films serving as the lowermost layerof the first and the second intergate insulating films are formed byradical nitriding.